Optical and electrical properties of capacitive coupled radio frequency Ar-H-2 mixture discharge at the low pressure

Abstract

In this study, the electrical and optical properties and plasma's parameters of capacitive radio frequency (RF) discharge for the argon and hydrogen mixture at low pressure are investigated using optical emission spectroscopy (OES) and a Langmuir probe. The wavelengths of spectral lines obtained from OES are between 400 and 950 nm. By using the spectral lines and probe data, the electron temperature for every different RF power, mixture rate and flow rate are determined by the modified Boltzmann curve method. The Langmuir probe gives the electron temperature and other plasma properties for the same discharge parameters. Published by AIP Publishing.